Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10577323 | Compound, resin, material for forming underlayer film for lithography, composition for forming underlayer film for lithography, underlayer film for lithography, pattern forming method, and method for purifying compound or resin | Junya HORIUCHI, Takashi MAKINOSHIMA, Masatoshi Echigo | 2020-03-03 |
| 10364314 | Compound, resin, material for forming underlayer film for lithography, composition for forming underlayer film for lithography, underlayer film for lithography, resist pattern forming method, circuit pattern forming method, and purification method | Junya HORIUCHI, Takashi MAKINOSHIMA, Masatoshi Echigo | 2019-07-30 |
| 10359701 | Material for forming underlayer film for lithography, composition for forming underlayer film for lithography, underlayer film for lithography and pattern forming method | Takashi MAKINOSHIMA, Masatoshi Echigo, Go Higashihara, Atsushi Okoshi | 2019-07-23 |
| 10338471 | Composition for forming underlayer film for lithography, underlayer film for lithography and pattern forming method | Takashi MAKINOSHIMA, Masatoshi Echigo, Go Higashihara, Atsushi Okoshi | 2019-07-02 |
| 9162431 | Laminate film | Nobuhiko Matsumoto, Eiichi Honda | 2015-10-20 |