Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12134596 | Compound, resin, composition, resist pattern formation method, circuit pattern formation method and method for purifying resin | Takashi MAKINOSHIMA, Masatoshi Echigo | 2024-11-05 |
| 11747728 | Compound, resin, composition, resist pattern formation method, circuit pattern formation method and method for purifying resin | Yu Okada, Takashi MAKINOSHIMA, Masatoshi Echigo | 2023-09-05 |
| 10577323 | Compound, resin, material for forming underlayer film for lithography, composition for forming underlayer film for lithography, underlayer film for lithography, pattern forming method, and method for purifying compound or resin | Kana OKADA, Takashi MAKINOSHIMA, Masatoshi Echigo | 2020-03-03 |
| 10364314 | Compound, resin, material for forming underlayer film for lithography, composition for forming underlayer film for lithography, underlayer film for lithography, resist pattern forming method, circuit pattern forming method, and purification method | Kana OKADA, Takashi MAKINOSHIMA, Masatoshi Echigo | 2019-07-30 |