Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6875288 | Cleaning agent and cleaning method | Takayuki Niuya, Hiroyuki Mori, Hiroshi Matsunaga, Fukusaburo Ishihara, Yoshiya Kimura +4 more | 2005-04-05 |
| 6514352 | Cleaning method using an oxidizing agent, chelating agent and fluorine compound | Takayuki Niuya, Hiroyuki Mori, Hiroshi Matsunaga, Fukusaburo Ishihara, Yoshiya Kimura +4 more | 2003-02-04 |
| 6478035 | Cleaning device, cleaning system, treating device and cleaning method | Takayuki Niuya, Michihiro Ono, Hiroyuki Mori | 2002-11-12 |
| 6462005 | Cleaning agent for a semiconductor device and a method of manufacturing a semiconductor device | Tetsuo Aoyama, Rieko Nakano, Hideki Fukuda | 2002-10-08 |
| 6265309 | Cleaning agent for use in producing semiconductor devices and process for producing semiconductor devices using the same | Tsuyoshi Matsui, Takayuki Niuya, Tetsuo Aoyama, Taketo Maruyama, Tetsuya Karita +3 more | 2001-07-24 |
| 5972862 | Cleaning liquid for semiconductor devices | Yoshimi Torii, Shunji Sasabe, Masayuki Kojima, Kazuhisa Usuami, Takafumi Tokunaga +8 more | 1999-10-26 |
| 5885901 | Rinsing solution after resist stripping process and method for manufacturing semiconductor device | Masao Miyazaki, Kiyoto Mori | 1999-03-23 |
| 5650041 | Semiconductor device fabrication method | Masaru Utsugi | 1997-07-22 |