Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9455264 | Semiconductor device and manufacturing method thereof | Tatsunori Kaneoka | 2016-09-27 |
| 9105739 | Semiconductor device and manufacturing method thereof | Tatsunori Kaneoka | 2015-08-11 |
| 8293632 | Manufacturing method of semiconductor device | Masaru Kadoshima, Shinsuke Sakashita, Jiro Yugami | 2012-10-23 |
| 8120118 | Semiconductor device and manufacturing method of the same | Shinsuke Sakashita, Jiro Yugami | 2012-02-21 |
| 7855134 | Semiconductor device and manufacturing method of the same | Shinsuke Sakashita, Jiro Yugami | 2010-12-21 |
| 7268047 | Semiconductor device and method for manufacturing the same | Tsunetoshi Arikado, Kazuyoshi Torii, Hiroshi Kitajima, Seiichi Miyazaki | 2007-09-11 |
| 7087495 | Method for manufacturing semiconductor device | Kazuyoshi Torii | 2006-08-08 |
| 7034369 | Semiconductor device and method for manufacturing the same | Tsunetoshi Arikado, Kazuyoshi Torii, Hiroshi Kitajima, Seiichi Miyazaki | 2006-04-25 |
| 6984565 | Method of manufacturing a semiconductor device | — | 2006-01-10 |
| 6638880 | Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device | Mikio Yamamuka, Masayoshi Tarutani, Tsuyoshi Horikawa, Shigeru Matsuno, Takehiko Sato | 2003-10-28 |
| 6512885 | Liquid raw material vaporizer, semiconductor device and method of manufacturing semiconductor device | Mikio Yamamuka, Masayoshi Tarutani, Tsuyoshi Horikawa | 2003-01-28 |
| 6470144 | Vaporizer for chemical vapor deposition apparatus, chemical vapor deposition apparatus, and semiconductor device manufactured thereby | Masayoshi Tarutani, Tsuyoshi Horikawa, Mikio Yamamuka, Shigeru Matsuno, Takehiko Sato | 2002-10-22 |
| 6448191 | Method of forming high dielectric constant thin film and method of manufacturing semiconductor device | Mikio Yamamuka, Tsuyoshi Horikawa, Masayoshi Tarutani, Takehiko Sato, Shigeru Matsuno | 2002-09-10 |
| 6312526 | Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device | Mikio Yamamuka, Masayoshi Tarutani, Tsuyoshi Horikawa, Shigeru Matsuno, Takehiko Sato | 2001-11-06 |
| 6273957 | Vaporizing device for CVD source materials and CVD apparatus employing the same | Mikio Yamamuka, Tsuyoshi Horikawa, Fusaoki Uchikawa, Shigeru Matsuno, Takehiko Sato +2 more | 2001-08-14 |
| 6235649 | Method of forming high dielectric constant thin film and method of manufacturing semiconductor device | Mikio Yamamuka, Tsuyoshi Horikawa, Masayoshi Tarutani, Takehiko Sato, Shigeru Matsuno | 2001-05-22 |
| 6179920 | CVD apparatus for forming thin film having high dielectric constant | Masayoshi Tarutani, Tsuyoshi Horikawa, Mikio Yamamuka | 2001-01-30 |
| 6165556 | High dielectric constant thin film structure, method for forming high dielectric constant thin film, and apparatus for forming high dielectric constant thin film | Mikio Yamamuka, Tetsuro Makita, Tsuyoshi Horikawa, Akimasa Yuuki, Teruo Shibano | 2000-12-26 |
| 6117482 | Method and apparatus for monitoring CVD liquid source for forming thin film with high dielectric constant | Tsuyoshi Horikawa, Masayoshi Tarutani, Mikio Yamamuka | 2000-09-12 |
| 6110291 | Thin film forming apparatus using laser | Kenyu Haruta, Koichi Ono, Hitoshi Wakata, Mutsumi Tsuda, Yoshio Saito +22 more | 2000-08-29 |
| 6110283 | Chemical vapor deposition apparatus | Mikio Yamamuka, Masayoshi Tarutani, Tsuyoshi Horikawa | 2000-08-29 |
| 6101085 | High dielectric constant thin film structure, method for forming high dielectric constant thin film, and apparatus for forming high dielectric constant thin film | Mikio Yamamuka, Tetsuro Makita, Tsuyoshi Horikawa, Akimasa Yuuki, Teruo Shibano | 2000-08-08 |
| 6096133 | Chemical vapor deposition apparatus | Akimasa Yuuki, Tetsuro Makita, Mikio Yamamuka, Koichi Ono, Tomonori Okudaira | 2000-08-01 |
| 6033732 | Apparatus for and method of forming thin film by chemical vapor deposition | Akimasa Yuuki, Tetsuro Makita, Mikio Yamamuka, Koichi Ono, Tomonori Okudaira | 2000-03-07 |
| 6022811 | Method of uniform CVD | Akimasa Yuuki, Kouitirou Tsutahara, Touru Yamaguchi | 2000-02-08 |