Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5989635 | High dielectric constant thin film structure, method for forming high dielectric constant thin film and apparatus for forming high dielectric constant thin film | Mikio Yamamuka, Tetsuro Makita, Tsuyoshi Horikawa, Akimasa Yuuki, Teruo Shibano | 1999-11-23 |
| 5882410 | High dielectric constant thin film structure, method for forming high dielectric constant thin film, and apparatus for forming high dielectric constant thin film | Mikio Yamamuka, Tetsuro Makita, Tsuyoshi Horikawa, Akimasa Yuuki, Teruo Shibano | 1999-03-16 |
| 5834060 | High dielectric constant thin film structure method for forming high dielectric constant thin film and apparatus for forming high dielectric contact thin film | Mikio Yamamuka, Tetsuro Makita, Tsuyoshi Horikawa, Akimasa Yuuki, Teruo Shibano | 1998-11-10 |
| 5776254 | Apparatus for forming thin film by chemical vapor deposition | Akimasa Yuuki, Tetsuro Makita, Mikio Yamamuka, Koichi Ono, Tomonori Okudaira | 1998-07-07 |
| 5760366 | Thin film forming apparatus using laser and magnetic field | Kenyu Haruta, Koichi Ono, Mutsumi Tsuda, Taisuke Furukawa | 1998-06-02 |
| 5669976 | CVD method and apparatus therefor | Akimasa Yuuki, Kouitirou Tsutahara, Touru Yamaguchi | 1997-09-23 |