Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8631762 | Plasma CVD apparatus, method for manufacturing semiconductor film, method for manufacturing thin-film solar cell, and method for cleaning plasma CVD apparatus | Tae Orita, Hiroya Yamarin | 2014-01-21 |
| 8546682 | Photoelectric converter and manufacturing method thereof, and photoelectric conversion module | Kyozo Kanamoto, Hirofumi Konishi, Hidetada Tokioka, Hiroyuki Fuchigami | 2013-10-01 |
| 6638880 | Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device | Takaaki Kawahara, Masayoshi Tarutani, Tsuyoshi Horikawa, Shigeru Matsuno, Takehiko Sato | 2003-10-28 |
| 6512885 | Liquid raw material vaporizer, semiconductor device and method of manufacturing semiconductor device | Takaaki Kawahara, Masayoshi Tarutani, Tsuyoshi Horikawa | 2003-01-28 |
| 6470144 | Vaporizer for chemical vapor deposition apparatus, chemical vapor deposition apparatus, and semiconductor device manufactured thereby | Masayoshi Tarutani, Tsuyoshi Horikawa, Takaaki Kawahara, Shigeru Matsuno, Takehiko Sato | 2002-10-22 |
| 6448191 | Method of forming high dielectric constant thin film and method of manufacturing semiconductor device | Takaaki Kawahara, Tsuyoshi Horikawa, Masayoshi Tarutani, Takehiko Sato, Shigeru Matsuno | 2002-09-10 |
| 6312526 | Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device | Takaaki Kawahara, Masayoshi Tarutani, Tsuyoshi Horikawa, Shigeru Matsuno, Takehiko Sato | 2001-11-06 |
| 6273957 | Vaporizing device for CVD source materials and CVD apparatus employing the same | Tsuyoshi Horikawa, Takaaki Kawahara, Fusaoki Uchikawa, Shigeru Matsuno, Takehiko Sato +2 more | 2001-08-14 |
| 6235649 | Method of forming high dielectric constant thin film and method of manufacturing semiconductor device | Takaaki Kawahara, Tsuyoshi Horikawa, Masayoshi Tarutani, Takehiko Sato, Shigeru Matsuno | 2001-05-22 |
| 6179920 | CVD apparatus for forming thin film having high dielectric constant | Masayoshi Tarutani, Tsuyoshi Horikawa, Takaaki Kawahara | 2001-01-30 |
| 6165556 | High dielectric constant thin film structure, method for forming high dielectric constant thin film, and apparatus for forming high dielectric constant thin film | Takaaki Kawahara, Tetsuro Makita, Tsuyoshi Horikawa, Akimasa Yuuki, Teruo Shibano | 2000-12-26 |
| 6117482 | Method and apparatus for monitoring CVD liquid source for forming thin film with high dielectric constant | Takaaki Kawahara, Tsuyoshi Horikawa, Masayoshi Tarutani | 2000-09-12 |
| 6110283 | Chemical vapor deposition apparatus | Takaaki Kawahara, Masayoshi Tarutani, Tsuyoshi Horikawa | 2000-08-29 |
| 6101085 | High dielectric constant thin film structure, method for forming high dielectric constant thin film, and apparatus for forming high dielectric constant thin film | Takaaki Kawahara, Tetsuro Makita, Tsuyoshi Horikawa, Akimasa Yuuki, Teruo Shibano | 2000-08-08 |
| 6096133 | Chemical vapor deposition apparatus | Akimasa Yuuki, Takaaki Kawahara, Tetsuro Makita, Koichi Ono, Tomonori Okudaira | 2000-08-01 |
| 6033732 | Apparatus for and method of forming thin film by chemical vapor deposition | Akimasa Yuuki, Takaaki Kawahara, Tetsuro Makita, Koichi Ono, Tomonori Okudaira | 2000-03-07 |
| 5989635 | High dielectric constant thin film structure, method for forming high dielectric constant thin film and apparatus for forming high dielectric constant thin film | Takaaki Kawahara, Tetsuro Makita, Tsuyoshi Horikawa, Akimasa Yuuki, Teruo Shibano | 1999-11-23 |
| 5882410 | High dielectric constant thin film structure, method for forming high dielectric constant thin film, and apparatus for forming high dielectric constant thin film | Takaaki Kawahara, Tetsuro Makita, Tsuyoshi Horikawa, Akimasa Yuuki, Teruo Shibano | 1999-03-16 |
| 5834060 | High dielectric constant thin film structure method for forming high dielectric constant thin film and apparatus for forming high dielectric contact thin film | Takaaki Kawahara, Tetsuro Makita, Tsuyoshi Horikawa, Akimasa Yuuki, Teruo Shibano | 1998-11-10 |
| 5776254 | Apparatus for forming thin film by chemical vapor deposition | Akimasa Yuuki, Takaaki Kawahara, Tetsuro Makita, Koichi Ono, Tomonori Okudaira | 1998-07-07 |