Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049910 | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus using a conveying robot conveying a semiconductor substrate | Ryuji Kirino | 2018-08-14 |
| 6109208 | Plasma generating apparatus with multiple microwave introducing means | Masaaki Tsuchihashi, Minoru Hanazaki, Toshio Komemura, Mutumi Tuda, Kouichi Ono +1 more | 2000-08-29 |
| 6054016 | Magnetically enhanced microwave plasma generating apparatus | Mutumi Tuda, Kouichi Ono, Masaaki Tsuchihashi, Minoru Hanazaki, Toshio Komemura +1 more | 2000-04-25 |
| 5210055 | Method for the plasma treatment of semiconductor devices | Toshinobu Banjyo | 1993-05-11 |