Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8111499 | System and method of sensing and removing residual charge from a processed wafer | Tuqiang Ni, Jinyuan Chen, Ruoxin Du, Liang Ouyang | 2012-02-07 |
| 8105736 | Method and system for overlay correction during photolithography | Xiao Yang, Yuxiang Wang, Justin Payne, Wook Ji | 2012-01-31 |
| 8106724 | Thin-film bulk acoustic resonators having perforated resonator body supports that enhance quality factor | Seungbae Lee, Harmeet Bhugra | 2012-01-31 |
| 7955885 | Methods of forming packaged micro-electromechanical devices | Harmeet Bhugra, Kuolung Lei | 2011-06-07 |
| 7939990 | Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations | Harmeet Bhugra | 2011-05-10 |
| 7898561 | MEMS mirror system for laser printing applications | Xiao Yang, William Spencer Worley, III, Dongmin Chen | 2011-03-01 |
| 7863697 | Method and apparatus for MEMS oscillator | Xiao Yang, Dongmin Chen, Justin Payne, Yuxiang Wang, Wook Ji | 2011-01-04 |
| 7834524 | Micro-electromechanical devices having variable capacitors therein that compensate for temperature-induced frequency drift in acoustic resonators | Harmeet Bhugra | 2010-11-16 |
| 7675670 | Fabrication of a high fill ratio silicon spatial light modulator | Xiao Yang, Yuxiang Wang, Wook Ji, Justin Payne, Howard Woo | 2010-03-09 |
| 7522330 | High fill ratio silicon spatial light modulator | Xiao Yang, Yuxiang Wang, Wook Ji, Justin Payne, William Spencer Worley, III +2 more | 2009-04-21 |
| 7453624 | Projection display system including a high fill ratio silicon spatial light modulator | Xiao Yang, Yuxiang Wang, Wook Ji, Justin Payne, William Spencer Worley, III +2 more | 2008-11-18 |
| 6451252 | Odor removal system and method having ozone and non-thermal plasma treatment | R. Roger Ruan, Hongbin Ma, Ling Chen, Philip R. Goodrich, Shaobo Deng | 2002-09-17 |