Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261012 | Plasma treatment apparatus, lower electrode assembly and forming method thereof | Tuqiang Ni, Sheng Guo, Xiang Sun, Guangwei Fan, Kuan-Yu Yang +2 more | 2025-03-25 |
| 8111499 | System and method of sensing and removing residual charge from a processed wafer | Tuqiang Ni, Jinyuan Chen, Ye Wang, Liang Ouyang | 2012-02-07 |