Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6056630 | Polishing apparatus with carrier head pivoting device | Laurence D. Schultz | 2000-05-02 |
| 6051500 | Device and method for polishing a semiconductor substrate | Alvaro Maury, Omar Rodriguez | 2000-04-18 |
| 5686359 | Titanium silicide process | Steven Glenn Meester, Cletus W. Wilkins, Jr. | 1997-11-11 |
| 5641994 | Multilayered A1-alloy structure for metal conductors | Cheryl Anne Bollinger, Edward Dein, Sailesh Mansinh Merchant, Pradip K. Roy, Cletus W. Wilkins, Jr. | 1997-06-24 |
| 5599739 | Barrier layer treatments for tungsten plug | Sailesh Mansinh Merchant, Pradip K. Roy | 1997-02-04 |
| 5561083 | Method of making multilayered Al-alloy structure for metal conductors | Cheryl Anne Bollinger, Edward Dein, Sailesh Mansinh Merchant, Pradip K. Roy, Cletus W. Wilkins, Jr. | 1996-10-01 |
| 5523259 | Method of forming metal layers formed as a composite of sub-layers using Ti texture control layer | Sailesh Mansinh Merchant, Pradip K. Roy | 1996-06-04 |
| 5489552 | Multiple layer tungsten deposition process | Sailesh Mansinh Merchant, Pradip K. Roy | 1996-02-06 |
| 5441616 | Integrated circuit fabrication method | Mark J. Sundahl, Edward J. Vajda | 1995-08-15 |
| 5312780 | Integrated circuit fabrication method | Mark J. Sundahl, Edward J. Vajda | 1994-05-17 |
| 5135886 | Integrated circuit fabrication utilizing amorphous layers | Ajit S. Manocha, Virendra V. Rana | 1992-08-04 |