Issued Patents All Time
Showing 26–50 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7282666 | Method and apparatus to increase throughput of processing using pulsed radiation sources | Vishnu K. Agarwal | 2007-10-16 |
| 7276315 | Methods for generating or designing sidelobe inhibitors for radiation patterning tools | Husayn Alvarez-Gomariz | 2007-10-02 |
| 7273684 | Mask having transmissive elements and a common sidelobe inhibitor for sidelobe suppression in radiated patterning | Husayn Alvarez-Gomariz | 2007-09-25 |
| 7229724 | Reticles and methods of forming and using the same | William Baggenstoss, Byron Neville Burgess, Erik Byers | 2007-06-12 |
| 7226707 | Methods of printing structures | H. Daniel Dulman | 2007-06-05 |
| 7130022 | Methods and systems for controlling radiation beam characteristics for microlithographic processing | Jeffrey Mackey | 2006-10-31 |
| 7107572 | Methods of forming patterned reticles | H. Daniel Dulman, John R. C. Futrell | 2006-09-12 |
| 7105278 | Pattern mask with features to minimize the effect of aberrations | Pary Baluswamy, William Baggenstoss | 2006-09-12 |
| 7093227 | Methods of forming patterned reticles | H. Daniel Dulman, John R. C. Futrell | 2006-08-15 |
| 7086031 | Methods of forming patterned reticles | H. Daniel Dulman, John R. C. Futrell | 2006-08-01 |
| 7073161 | Methods of forming patterned reticles | H. Daniel Dulman, John R. C. Futrell | 2006-07-04 |
| 7046339 | Optimized optical lithography illumination source for use during the manufacture of a semiconductor device | Jeffrey Mackey | 2006-05-16 |
| 7008738 | Microlithographic structures and method of fabrication | H. Daniel Dulman | 2006-03-07 |
| 6911301 | Methods of forming aligned structures with radiation-sensitive material | H. Daniel Dulman | 2005-06-28 |
| 6894765 | Methods and systems for controlling radiation beam characteristics for microlithographic processing | Jeffrey Mackey | 2005-05-17 |
| 6887629 | Radiation-patterning tool | H. Daniel Dulman | 2005-05-03 |
| 6854106 | Reticles and methods of forming and using the same | William Baggenstoss, Byron Neville Burgess, Erik Byers | 2005-02-08 |
| 6844118 | Method and layout for high density reticle | — | 2005-01-18 |
| 6842889 | Methods of forming patterned reticles | H. Daniel Dulman, John R. C. Futrell | 2005-01-11 |
| 6818359 | Reticles and methods of forming and using the same | Byron Neville Burgess | 2004-11-16 |
| 6818910 | Writing methodology to reduce write time, and system for performing same | Eugene DeLaRosa | 2004-11-16 |
| 6807519 | Methods of forming radiation-patterning tools; carrier waves and computer readable media | — | 2004-10-19 |
| 6803155 | Microlithographic device, microlithographic assist features, system for forming contacts and other structures, and method of determining mask patterns | H. Daniel Dulman | 2004-10-12 |
| 6803157 | Pattern mask with features to minimize the effect of aberrations | Pary Baluswamy, William Baggenstoss | 2004-10-12 |
| 6753617 | Method for improving a stepper signal in a planarized surface over alignment topography | Phillip G. Wald, Kunal R. Parekh | 2004-06-22 |