Issued Patents All Time
Showing 51–75 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6200901 | Polishing polymer surfaces on non-porous CMP pads | Guy F. Hudson | 2001-03-13 |
| 6180450 | Semiconductor processing methods of forming stacked capacitors | Charles H. Dennison | 2001-01-30 |
| 6168986 | Method of making a sacrificial self-aligned interconnect structure | Karl M. Robinson | 2001-01-02 |
| 6136043 | Polishing pad methods of manufacture and use | Karl M. Robinson, John Skrovan | 2000-10-24 |
| 6103627 | Treatment of a surface having an exposed silicon/silica interface | Karl M. Robinson | 2000-08-15 |
| 6096650 | Treatment of a surface having exposed silica | Karl M. Robinson | 2000-08-01 |
| 6090475 | Polishing pad, methods of manufacturing and use | Karl M. Robinson, John Skrovan | 2000-07-18 |
| 6044851 | Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication | Eric K. Grieger, Michael T. Andreas | 2000-04-04 |
| 6037218 | Semiconductor processing methods of forming stacked capacitors | Charles H. Dennison | 2000-03-14 |
| 5990012 | Chemical-mechanical polishing of hydrophobic materials by use of incorporated-particle polishing pads | Karl M. Robinson | 1999-11-23 |
| 5981396 | Method for chemical-mechanical planarization of stop-on-feature semiconductor wafers | Karl M. Robinson | 1999-11-09 |
| 5963814 | Method of forming recessed container cells by wet etching conductive layer and dissimilar layer formed over conductive layer | Michael T. Andreas | 1999-10-05 |
| 5942131 | Treatment of a surface having an expose silicon/silica interface | Karl M. Robinson | 1999-08-24 |
| 5919082 | Fixed abrasive polishing pad | Karl M. Robinson | 1999-07-06 |
| 5893754 | Method for chemical-mechanical planarization of stop-on-feature semiconductor wafers | Karl M. Robinson | 1999-04-13 |
| 5855811 | Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication | Eric K. Grieger, Michael T. Andreas | 1999-01-05 |
| 5855804 | Method and apparatus for stopping mechanical and chemical-mechanical planarization of substrates at desired endpoints | — | 1999-01-05 |
| 5779522 | Directional spray pad scrubber | Karl M. Robinson | 1998-07-14 |
| 5733176 | Polishing pad and method of use | Karl M. Robinson | 1998-03-31 |
| 5690540 | Spiral grooved polishing pad for chemical-mechanical planarization of semiconductor wafers | Richard L. Elliott | 1997-11-25 |
| 5686038 | Resin transfer molding of composite materials that emit volatiles during processing | Stephen Christensen | 1997-11-11 |
| 5652164 | Semiconductor processing methods of forming stacked capacitors | Charles H. Dennison | 1997-07-29 |
| 5649262 | Film cleaning apparatus and method | Terence Andrew Watts | 1997-07-15 |
| 5645737 | Wet clean for a surface having an exposed silicon/silica interface | Karl M. Robinson | 1997-07-08 |
| 5616069 | Directional spray pad scrubber | Karl M. Robinson | 1997-04-01 |