Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632743 | Post-planarization, pre-oxide removal ozone treatment | Tim J. Kennedy, Robert H. Whitney, Gunnar A. Barnhart | 2003-10-14 |
| 6568999 | Method and apparatus for cleaning a surface of a microelectronic substrate | Gunnar A. Barnhart, Greg Green | 2003-05-27 |
| 6468951 | Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication | Michael T. Andreas, Michael A. Walker | 2002-10-22 |
| 6406358 | Method and apparatus for cleaning a surface of a microelectronic substrate | Gunnar A. Barnhart, Greg Green | 2002-06-18 |
| 6365042 | Apparatus for removing noble metal contamination from liquids | Troy Sorensen | 2002-04-02 |
| 6100198 | Post-planarization, pre-oxide removal ozone treatment | Tim J. Kennedy, Robert H. Whitney, Gunnar A. Barnhart | 2000-08-08 |
| 6044851 | Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication | Michael T. Andreas, Michael A. Walker | 2000-04-04 |
| 5855811 | Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication | Michael T. Andreas, Michael A. Walker | 1999-01-05 |
| 5691211 | Method for gettering noble metals from mineral acid solution | Troy Sorensen | 1997-11-25 |
| 5501767 | Method for gettering noble metals from mineral acid solution | Troy Sorensen | 1996-03-26 |