| 6632743 |
Post-planarization, pre-oxide removal ozone treatment |
Tim J. Kennedy, Robert H. Whitney, Gunnar A. Barnhart |
2003-10-14 |
| 6568999 |
Method and apparatus for cleaning a surface of a microelectronic substrate |
Gunnar A. Barnhart, Greg Green |
2003-05-27 |
| 6468951 |
Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication |
Michael T. Andreas, Michael A. Walker |
2002-10-22 |
| 6406358 |
Method and apparatus for cleaning a surface of a microelectronic substrate |
Gunnar A. Barnhart, Greg Green |
2002-06-18 |
| 6365042 |
Apparatus for removing noble metal contamination from liquids |
Troy Sorensen |
2002-04-02 |
| 6100198 |
Post-planarization, pre-oxide removal ozone treatment |
Tim J. Kennedy, Robert H. Whitney, Gunnar A. Barnhart |
2000-08-08 |
| 6044851 |
Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication |
Michael T. Andreas, Michael A. Walker |
2000-04-04 |
| 5855811 |
Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication |
Michael T. Andreas, Michael A. Walker |
1999-01-05 |
| 5691211 |
Method for gettering noble metals from mineral acid solution |
Troy Sorensen |
1997-11-25 |
| 5501767 |
Method for gettering noble metals from mineral acid solution |
Troy Sorensen |
1996-03-26 |
