Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7077722 | Systems and methods for actuating end effectors to condition polishing pads used for polishing microfeature workpieces | Brett A. Mayes, Michael E. Meadows, Charles Dringle | 2006-07-18 |
| 6632743 | Post-planarization, pre-oxide removal ozone treatment | Eric K. Grieger, Tim J. Kennedy, Robert H. Whitney | 2003-10-14 |
| 6568999 | Method and apparatus for cleaning a surface of a microelectronic substrate | Eric K. Grieger, Greg Green | 2003-05-27 |
| 6406358 | Method and apparatus for cleaning a surface of a microelectronic substrate | Eric K. Grieger, Greg Green | 2002-06-18 |
| 6100198 | Post-planarization, pre-oxide removal ozone treatment | Eric K. Grieger, Tim J. Kennedy, Robert H. Whitney | 2000-08-08 |