Issued Patents All Time
Showing 26–50 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428404 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Scott E. Moore | 2002-08-06 |
| 6425815 | Fixed abrasive polishing pad | Karl M. Robinson | 2002-07-30 |
| 6419568 | Fixed abrasive polishing pad | Karl M. Robinson | 2002-07-16 |
| 6419560 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Scott E. Moore | 2002-07-16 |
| 6416616 | Apparatus for releasably attaching polishing pads to planarizing machines in mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies | — | 2002-07-09 |
| 6409581 | Belt polishing pad method | Karl M. Robinson | 2002-06-25 |
| 6409586 | Fixed abrasive polishing pad | Karl M. Robinson | 2002-06-25 |
| 6402601 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Scott E. Moore | 2002-06-11 |
| 6386951 | Methods of polishing materials, methods of slowing a rate of material removal of a polishing process, and methods of forming trench isolation regions | Karl M. Robinson | 2002-05-14 |
| 6364749 | CMP polishing pad with hydrophilic surfaces for enhanced wetting | — | 2002-04-02 |
| 6361417 | Method and apparatus for supporting a polishing pad during chemical-mechanical planarization of microelectronic substrates | Karl M. Robinson | 2002-03-26 |
| 6331139 | Method and apparatus for supporting a polishing pad during chemical-mechanical planarization of microelectronic substrates | Karl M. Robinson | 2001-12-18 |
| 6306014 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Scott E. Moore | 2001-10-23 |
| 6296557 | Method and apparatus for releasably attaching polishing pads to planarizing machines in mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies | — | 2001-10-02 |
| 6290579 | Fixed abrasive polishing pad | Karl M. Robinson | 2001-09-18 |
| 6277015 | Polishing pad and system | Karl M. Robinson | 2001-08-21 |
| 6273800 | Method and apparatus for supporting a polishing pad during chemical-mechanical planarization of microelectronic substrates | Karl M. Robinson | 2001-08-14 |
| 6273100 | Surface cleaning apparatus and method | Michael T. Andreas | 2001-08-14 |
| 6269511 | Surface cleaning apparatus | Michael T. Andreas | 2001-08-07 |
| 6261163 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Scott E. Moore | 2001-07-17 |
| 6261922 | Methods of forming trench isolation regions | Karl M. Robinson | 2001-07-17 |
| 6258660 | Method of making a self-aligned recessed container cell capacitor | Karl M. Robinson | 2001-07-10 |
| 6254460 | Fixed abrasive polishing pad | Karl M. Robinson | 2001-07-03 |
| 6224466 | Methods of polishing materials, methods of slowing a rate of material removal of a polishing process | Karl M. Robinson | 2001-05-01 |
| 6206769 | Method and apparatus for stopping mechanical and chemical mechanical planarization of substrates at desired endpoints | — | 2001-03-27 |