Issued Patents All Time
Showing 126–147 of 147 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5403435 | Process for selectively etching integrated circuit devices having deep trenches or troughs or elevated features with re-entrant profiles | David A. Cathey | 1995-04-04 |
| 5376483 | Method of making masks for phase shifting lithography | — | 1994-12-27 |
| 5374868 | Method for formation of a trench accessible cold-cathode field emission device | Kevin Tjaden | 1994-12-20 |
| 5372901 | Removable bandpass filter for microlithographic aligners | David A. Cathey | 1994-12-13 |
| 5372973 | Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology | Trung T. Doan, Tyler Lowrey, David A. Cathey | 1994-12-13 |
| 5358892 | Etch stop useful in avoiding substrate pitting with poly buffered locos | — | 1994-10-25 |
| 5358599 | Process for etching a semiconductor device using an improved protective etching mask | David A. Cathey | 1994-10-25 |
| 5329207 | Field emission structures produced on macro-grain polysilicon substrates | David A. Cathey, Tyler Lowrey, Trung T. Doan | 1994-07-12 |
| 5300463 | Method of selectively etching silicon dioxide dielectric layers on semiconductor wafers | David A. Cathey | 1994-04-05 |
| 5275237 | Liquid filled hot plate for precise temperature control | Michael W. Starkweather | 1994-01-04 |
| 5259799 | Method to form self-aligned gate structures and focus rings | Trung T. Doan, Tyler Lowrey, David A. Cathey | 1993-11-09 |
| 5240796 | Method of fabricating a chromeless phase shift reticle | Ruojia Lee | 1993-08-31 |
| 5232549 | Spacers for field emission display fabricated via self-aligned high energy ablation | David A. Cathey, Chris C. Yu, Trung T. Doan, Tyler Lowrey | 1993-08-03 |
| 5229331 | Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology | Trung T. Doan, Tyler Lowrey, David A. Cathey | 1993-07-20 |
| 5225035 | Method of fabricating a phase-shifting photolithographic mask reticle having identical light transmittance in all transparent regions | — | 1993-07-06 |
| 5223083 | Process for etching a semiconductor device using an improved protective etching mask | David A. Cathey | 1993-06-29 |
| 5205770 | Method to form high aspect ratio supports (spacers) for field emission display using micro-saw technology | Tyler Lowrey, Trung T. Doan, David A. Cathey | 1993-04-27 |
| 5194346 | Method of fabricating phase shifting reticles with an accurate phase shift layer | David A. Cathey | 1993-03-16 |
| 5194345 | Method of fabricating phase shift reticles | — | 1993-03-16 |
| 5194344 | Method of fabricating phase shift reticles including chemically mechanically planarizing | David A. Cathey | 1993-03-16 |
| 5186670 | Method to form self-aligned gate structures and focus rings | Trung T. Doan, Tyler Lowrey, David A. Cathey | 1993-02-16 |
| 5091290 | Process for promoting adhesion of a layer of photoresist on a substrate having a previous layer of photoresist | — | 1992-02-25 |