Issued Patents All Time
Showing 76–100 of 192 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7405438 | Capacitor constructions and semiconductor structures | Shenlin Chen, Trung T. Doan, Guy T. Blalock, Lyle Breiner | 2008-07-29 |
| 7355232 | Memory devices with dual-sided capacitors | Shenlin Chen | 2008-04-08 |
| 7344755 | Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers | Kevin L. Beaman, Ronald A. Weimer, Lyle Breiner, Trung T. Doan, Cem Basceri +2 more | 2008-03-18 |
| 7342273 | Applying epitaxial silicon in disposable spacer flow | Chih-Chen Cho | 2008-03-11 |
| 7321148 | Capacitor constructions and rugged silicon-containing surfaces | Guy T. Blalock, Lyle Breiner, Shenlin Chen | 2008-01-22 |
| 7317220 | Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth | — | 2008-01-08 |
| 7279398 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces | Cem Basceri, Trung T. Doan, Ronald A. Weimer, Kevin L. Beaman, Lyle Breiner +3 more | 2007-10-09 |
| 7268382 | DRAM cells | Shenlin Chen, Trung T. Doan, Guy T. Blalock, Lyle Breiner | 2007-09-11 |
| 7258892 | Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition | Kevin L. Beaman, Trung T. Doan, Lyle Breiner, Ronald A. Weimer, David J. Kubista +2 more | 2007-08-21 |
| 7247581 | Methods for treating pluralities of discrete semiconductor substrates | Trung T. Doan, Lyle Breiner, Lingyi A. Zheng | 2007-07-24 |
| 7244648 | Methods of forming semiconductor constructions | Zhiping Yin | 2007-07-17 |
| 7238613 | Diffusion-enhanced crystallization of amorphous materials to improve surface roughness | Randhir P. S. Thakur | 2007-07-03 |
| 7235138 | Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces | Lingyi A. Zheng, Trung T. Doan, Lyle Breiner, Ronald A. Weimer, David J. Kubista +2 more | 2007-06-26 |
| 7220312 | Methods for treating semiconductor substrates | Trung T. Doan, Lyle Breiner, Lingyi A. Zheng | 2007-05-22 |
| 7199017 | Methods of forming semiconductor circuitry | Fernando Gonzalez | 2007-04-03 |
| 7183208 | Methods for treating pluralities of discrete semiconductor substrates | Trung T. Doan, Lyle Breiner, Lingyi A. Zheng | 2007-02-27 |
| 7176109 | Method for forming raised structures by controlled selective epitaxial growth of facet using spacer | Jeffrey McKee | 2007-02-13 |
| 7148118 | Methods of forming metal nitride, and methods of forming capacitor constructions | Lingyi A. Zheng | 2006-12-12 |
| 7119369 | FET having epitaxial silicon growth | Zhongze Wang, Chih-Chen Cho | 2006-10-10 |
| 7112544 | Method of atomic layer deposition on plural semiconductor substrates simultaneously | Trung T. Doan, Lyle Breiner, Lingyi A. Zheng | 2006-09-26 |
| 7101435 | Methods for epitaxial silicon growth | Jingyan Zhang | 2006-09-05 |
| 7101756 | Methods for enhancing capacitors having roughened features to increase charge-storage capacity | Randhir P. S. Thakur, Garry Mercaldi, Michael Nuttall, Shenlin Chen | 2006-09-05 |
| 7090815 | Nanometer engineering of metal-support catalysts | Yongjun Jeff Hu | 2006-08-15 |
| 7071056 | Method of forming a dual-sided capacitor | Shenlin Chen | 2006-07-04 |
| 7056806 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces | Cem Basceri, Trung T. Doan, Ronald A. Weimer, Kevin L. Beaman, Lyle Breiner +3 more | 2006-06-06 |