Issued Patents All Time
Showing 126–130 of 130 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4431898 | Inductively coupled discharge for plasma etching and resist stripping | George N. Steinberg, Charles B. Zarowin | 1984-02-14 |
| 4407850 | Profile control photoresist | Richard H. Bruce | 1983-10-04 |
| 4368092 | Apparatus for the etching for semiconductor devices | George N. Steinberg | 1983-01-11 |
| 4367114 | High speed plasma etching system | George N. Steinberg, Jean Dalle Ave | 1983-01-04 |
| 4200666 | Single component monomer for silicon nitride deposition | — | 1980-04-29 |