Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6099056 | Non-contact holder for wafer-like articles | Oleg Siniaguine | 2000-08-08 |
| 5567255 | Solid annular gas discharge electrode | — | 1996-10-22 |
| 5372674 | Electrode for use in a plasma assisted chemical etching process | — | 1994-12-13 |
| 5298103 | Electrode assembly useful in confined plasma assisted chemical etching | Charles B. Zarowin | 1994-03-29 |
| 4473777 | Electron emitter assembly | W. Derek Buckley | 1984-09-25 |
| 4431898 | Inductively coupled discharge for plasma etching and resist stripping | Alan R. Reinberg, Charles B. Zarowin | 1984-02-14 |
| 4368092 | Apparatus for the etching for semiconductor devices | Alan R. Reinberg | 1983-01-11 |
| 4367114 | High speed plasma etching system | Alan R. Reinberg, Jean Dalle Ave | 1983-01-04 |