Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4831640 | Illumination system for x-ray lithography | — | 1989-05-16 |
| 4579616 | Method of fabrication of an optically flat membrane | Henry Windischmann | 1986-04-01 |
| 4523974 | Method of fabricating a pellicle cover for projection printing system | Dawn L. Duly, Henry Windischmann | 1985-06-18 |
| 4473777 | Electron emitter assembly | George N. Steinberg | 1984-09-25 |
| 4472824 | Apparatus for effecting alignment and spacing control of a mask and wafer for use in X-ray lithography | — | 1984-09-18 |
| 4465759 | Method of fabricating a pellicle cover for projection printing system | Dawn L. Duly, Henry Windischmann | 1984-08-14 |
| 4329410 | Production of X-ray lithograph masks | — | 1982-05-11 |