Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6379490 | System for improving the total thickness variation of a wafer | L. David Bollinger, James F. Nester | 2002-04-30 |
| 5811021 | Plasma assisted chemical transport method and apparatus | Robert Baron | 1998-09-22 |
| 5641546 | Passivation of electronic modules using high density plasmas | Dennis F. Elwell | 1997-06-24 |
| 5376224 | Method and apparatus for non-contact plasma polishing and smoothing of uniformly thinned substrates | — | 1994-12-27 |
| 5336355 | Methods and apparatus for confinement of a plasma etch region for precision shaping of surfaces of substances and films | L. David Bollinger | 1994-08-09 |
| 5298103 | Electrode assembly useful in confined plasma assisted chemical etching | George N. Steinberg | 1994-03-29 |
| 5291415 | Method to determine tool paths for thinning and correcting errors in thickness profiles of films | L. David Bollinger | 1994-03-01 |
| 5290382 | "Methods and apparatus for generating a plasma for ""downstream"" rapid shaping of surfaces of substrates and films" | L. David Bollinger | 1994-03-01 |
| 5254830 | System for removing material from semiconductor wafers using a contained plasma | L. David Bollinger | 1993-10-19 |
| 5238532 | Method and apparatus for removal of subsurface damage in semiconductor materials by plasma etching | L. David Bollinger | 1993-08-24 |
| 5148319 | System for fabricating micro optical elements | Edward J. Gratrix | 1992-09-15 |
| 5106827 | Plasma assisted oxidation of perovskites for forming high temperature superconductors using inductively coupled discharges | Michael Borden, Keith Daniell, Matthew B. Magida | 1992-04-21 |
| 4668366 | Optical figuring by plasma assisted chemical transport and etching apparatus therefor | — | 1987-05-26 |
| 4647512 | Diamond-like carbon films and process for production thereof | N. Venkataramanan | 1987-03-03 |
| 4431898 | Inductively coupled discharge for plasma etching and resist stripping | Alan R. Reinberg, George N. Steinberg | 1984-02-14 |