Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6379490 | System for improving the total thickness variation of a wafer | L. David Bollinger, Charles B. Zarowin | 2002-04-30 |
| 4328298 | Process for manufacturing lithography masks | — | 1982-05-04 |
| 4302316 | Non-contacting technique for electroplating X-ray lithography | — | 1981-11-24 |
| 4246054 | Polymer membranes for X-ray masks | — | 1981-01-20 |