Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6135863 | Method of conditioning wafer polishing pads | David Zhang, Ralph V. Vogelgesang | 2000-10-24 |
| 5837662 | Post-lapping cleaning process for silicon wafers | Jing Chai, Judith A. Schmidt, Thomas E. Doane | 1998-11-17 |
| 5626159 | Apparatus for cleaning semiconductor wafers | Ronald D. Bartram, Eugene R. Hollander, Jing Chai | 1997-05-06 |
| 5593505 | Method for cleaning semiconductor wafers with sonic energy and passing through a gas-liquid-interface | Ronald D. Bartram, Eugene R. Hollander, Jing Chai | 1997-01-14 |
| 5340437 | Process and apparatus for etching semiconductor wafers | Roland R. Vandamme | 1994-08-23 |