Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6932951 | Microfabricated chemical reactor | Matthew Losey, Klavs F. Jensen | 2005-08-23 |
| 6871544 | Sensor design and process | Arjun Selvakumar, Howard D. Goldberg, Duli Yu, Matthew W. Ip, James L. Marsh +2 more | 2005-03-29 |
| 6810899 | Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions | Aleksander Franz, Klavs F. Jensen, Samara Firebaugh | 2004-11-02 |
| 6692952 | Cell analysis and sorting apparatus for manipulation of cells | Rebecca Braff, Joel Voldman, Martha Gray, Mehmet Toner | 2004-02-17 |
| 6671078 | Electrostatic zipper actuator optical beam switching system and method of operation | Dale C. Flanders | 2003-12-30 |
| 6647088 | Production of a dense mist of micrometric droplets in particular for extreme UV lithography | Olivier Sublemontier | 2003-11-11 |
| 6541676 | Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions | Aleksander Franz, Klavs F. Jensen, Samara Firebaugh | 2003-04-01 |
| 6538798 | Process for fabricating stiction control bumps on optical membrane via conformal coating of etch holes | Michael F. Miller | 2003-03-25 |
| 6454421 | Dual axis micro machined mirror device | Duli Yu, Lianzhong Yu, Howard D. Goldberg | 2002-09-24 |
| 6435900 | Conductor-connecting element | Klaus Olejarz | 2002-08-20 |
| 6392313 | Microturbomachinery | Alan H. Epstein, Stephen D. Senturia, Ian A. Waitz, Jeffrey H. Lang, Stuart A. Jacobson +5 more | 2002-05-21 |
| 6345132 | Optical switching element and switching arrangement | Antoni Picard, Klaus-Peter Kamper, Jane Schulze, Michel Neumeier | 2002-02-05 |
| 6315423 | Micro machined mirror | Duli Yu, Lianzhong Yu, Howard D. Goldberg, Robert Ried | 2001-11-13 |
| 6099921 | Formable decorative greenery | Lillian Nancy Schmidt, Steven Schmidt, Karl Schmidt | 2000-08-08 |
| 5932940 | Microturbomachinery | Alan H. Epstein, Stephen D. Senturia, Ian A. Waitz, Jeffrey H. Lang, Stuart A. Jacobson +5 more | 1999-08-03 |
| 5740228 | X-ray radiolucent material, method for its manufacture, and its use | Thomas Zetterer | 1998-04-14 |
| 5511428 | Backside contact of sensor microstructures | Howard D. Goldberg | 1996-04-30 |
| 5264375 | Superconducting detector and method of making same | Christopher A. Bang, Markus Flik, Zhoumin Zhang | 1993-11-23 |
| 5238223 | Method of making a microvalve | Michael Mettner, Theresa Lober, Michael A. Huff | 1993-08-24 |
| 5199298 | Wall shear stress sensor | Kay Y. Ng | 1993-04-06 |
| 5164558 | Micromachined threshold pressure switch and method of manufacture | Michael A. Huff | 1992-11-17 |
| 5142781 | Method of making a microvalve | Michael Mettner, Theresa Lober, Michael A. Huff | 1992-09-01 |
| 5129981 | Method of selectively etching silicon | Su-Chee Simon Wang, Vincent M. McNeil | 1992-07-14 |
| 5129982 | Selective electrochemical etching | Su-Chee Simon Wang, Vincent M. McNeil | 1992-07-14 |
| 5090112 | Method and apparatus for manufacturing coils | Gunther Bensch, Markus Schneider, Bert Walch | 1992-02-25 |