Issued Patents All Time
Showing 1–25 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297529 | Method and system for controlling the state of stress in deposited thin films | Paul Sunal | 2025-05-13 |
| 12263376 | Microsensors applied to athletes bodies in order to provide real-time feedback about sport-specific technique for sport performance improvements | — | 2025-04-01 |
| 12194464 | Integrated microfluidic system and method of fabrication | — | 2025-01-14 |
| 11995989 | Visualization of planned autonomous vehicle behavior | Brian Clark, Flavius Popescu, Chad Lawrence Bettencourt, Tejeswara Reddy Pogula, Yuxi Zhang +4 more | 2024-05-28 |
| 11990344 | Low-cost method of making a hard mask for high resolution and low dimensional variations for the fabrication and manufacturing of micro- and nano-devices and -systems | — | 2024-05-21 |
| 11984321 | Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride | Mehmet Ozgur, Michael Syskind PEDERSEN | 2024-05-14 |
| 11927281 | Piezoelectrically-actuated microvalve device and method of fabrication | Mehmet Ozgur | 2024-03-12 |
| 11926522 | Packaging of microfluidic devices and microfluidic integrated systems and method of fabrication | — | 2024-03-12 |
| 11788646 | Three-way piezoelectrically-actuated microvalve device and method of fabrication | — | 2023-10-17 |
| 11326717 | Three-way piezoelectrically-actuated microvalve device and method of fabrication | — | 2022-05-10 |
| 11075086 | Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride | Mehmet Ozgur, Michael Syskind PEDERSEN | 2021-07-27 |
| 11049725 | Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride | Mehmet Ozgur, Michael Syskind PEDERSEN | 2021-06-29 |
| 11035496 | Three-way microvalve device and method of fabrication | — | 2021-06-15 |
| 10910185 | Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devices | Mehmet Ozgur, Paul Sunal, Lance Oh, Michael Syskind PEDERSEN | 2021-02-02 |
| 10403463 | Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devices | Mehmet Ozgur, Paul Sunal, Lance Oh, Michael Syskind PEDERSEN | 2019-09-03 |
| 10323772 | Three-way microvalve device and method of fabrication | — | 2019-06-18 |
| 9852870 | Method for the fabrication of electron field emission devices including carbon nanotube field electron emisson devices | Mehmet Ozgur, Paul Sunal, Lance Oh, Michael Syskind PEDERSEN | 2017-12-26 |
| 9646878 | Method for fabricating and manufacturing micro—and nano-fabricated devices and systems securely | — | 2017-05-09 |
| 9576773 | Method for etching deep, high-aspect ratio features into glass, fused silica, and quartz materials | Michael Syskind PEDERSEN | 2017-02-21 |
| 9536706 | Self-aligned dynamic pattern generator device and method of fabrication | Michael Syskind PEDERSEN | 2017-01-03 |
| 9312103 | Self-aligned dynamic pattern generator device and method of fabrication | Michael Syskind PEDERSEN | 2016-04-12 |
| 9099248 | Variable capacitor tuned using laser micromachining | Mehmet Ozgur | 2015-08-04 |
| 9053929 | Method and system for integrated MEMS and NEMS using deposited thin films having pre-determined stress states | Paul Sunal | 2015-06-09 |
| 9019686 | Variable capacitor tuned using laser micromachining | Mehmet Ozgur | 2015-04-28 |
| 8983414 | Versatile communication system and method of implementation using heterogeneous integration | Mehmet Ozgur, Michael Syskind PEDERSEN | 2015-03-17 |