Issued Patents All Time
Showing 26–47 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8895338 | Method of fabricating MEMS, NEMS, photonic, micro- and nano-fabricated devices and systems | — | 2014-11-25 |
| 8852378 | Tailorable titanium-tungsten alloy material thermally matched to semiconductor substrates and devices | Paul Sunal | 2014-10-07 |
| 8790534 | System and method for precision fabrication of micro- and nano-devices and structures | — | 2014-07-29 |
| 8660157 | Means for improved implementation of laser diodes and laser diode arrays | Jonah H. Jacob | 2014-02-25 |
| 8304324 | Low-temperature wafer bonding of semiconductors to metals | — | 2012-11-06 |
| 8270081 | Method of reflecting impinging electromagnetic radiation and limiting heating caused by absorbed electromagnetic radiation using engineered surfaces on macro-scale objects | — | 2012-09-18 |
| 8243766 | Means for improved implementation of laser diodes and laser diode arrays | Jonah H. Jacob | 2012-08-14 |
| 8007695 | Method of fabricating small dimensioned lens elements and lens arrays using surface tension effects | — | 2011-08-30 |
| 7994463 | Fabrication of transducer structures | Allen M. Flusberg | 2011-08-09 |
| 7679042 | Fabrication of transducer structures | Allen M. Flusberg | 2010-03-16 |
| 7188530 | Micro-mechanical capacitive inductive sensor for detection of relative or absolute pressure | Michael Syskind PEDERSEN, Mehmet Ozgur | 2007-03-13 |
| 7052926 | Fabrication of movable micromechanical components employing low-cost, high-resolution replication technology method | — | 2006-05-30 |
| 7045440 | Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates | Mehmet Ozgur | 2006-05-16 |
| 7024936 | Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure | Michael Syskind PEDERSEN, Mehmet Ozgur | 2006-04-11 |
| 7017419 | Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure | Michael Syskind PEDERSEN, Mehmet Ozgur | 2006-03-28 |
| 7012327 | Phased array antenna using (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates | Mehmet Ozgur | 2006-03-14 |
| 6909589 | MEMS-based variable capacitor | — | 2005-06-21 |
| 6815739 | Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates | Mehmet Ozgur | 2004-11-09 |
| 6622558 | Method and sensor for detecting strain using shape memory alloys | William L. Benard, Frederick J. Lisy, Troy Prince | 2003-09-23 |
| 5238223 | Method of making a microvalve | Michael Mettner, Martin Schmidt, Theresa Lober | 1993-08-24 |
| 5164558 | Micromachined threshold pressure switch and method of manufacture | Martin Schmidt | 1992-11-17 |
| 5142781 | Method of making a microvalve | Michael Mettner, Martin Schmidt, Theresa Lober | 1992-09-01 |