Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984321 | Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride | Michael Syskind PEDERSEN, Michael A. Huff | 2024-05-14 |
| 11927281 | Piezoelectrically-actuated microvalve device and method of fabrication | Michael A. Huff | 2024-03-12 |
| 11075086 | Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride | Michael Syskind PEDERSEN, Michael A. Huff | 2021-07-27 |
| 11049725 | Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride | Michael Syskind PEDERSEN, Michael A. Huff | 2021-06-29 |
| 10910185 | Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devices | Paul Sunal, Lance Oh, Michael A. Huff, Michael Syskind PEDERSEN | 2021-02-02 |
| 10403463 | Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devices | Paul Sunal, Lance Oh, Michael A. Huff, Michael Syskind PEDERSEN | 2019-09-03 |
| 9852870 | Method for the fabrication of electron field emission devices including carbon nanotube field electron emisson devices | Paul Sunal, Lance Oh, Michael A. Huff, Michael Syskind PEDERSEN | 2017-12-26 |
| 9099248 | Variable capacitor tuned using laser micromachining | Michael A. Huff | 2015-08-04 |
| 9019686 | Variable capacitor tuned using laser micromachining | Michael A. Huff | 2015-04-28 |
| 8983414 | Versatile communication system and method of implementation using heterogeneous integration | Michael Syskind PEDERSEN, Michael A. Huff | 2015-03-17 |
| 7188530 | Micro-mechanical capacitive inductive sensor for detection of relative or absolute pressure | Michael Syskind PEDERSEN, Michael A. Huff | 2007-03-13 |
| 7045440 | Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates | Michael A. Huff | 2006-05-16 |
| 7024936 | Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure | Michael Syskind PEDERSEN, Michael A. Huff | 2006-04-11 |
| 7017419 | Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure | Michael Syskind PEDERSEN, Michael A. Huff | 2006-03-28 |
| 7012327 | Phased array antenna using (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates | Michael A. Huff | 2006-03-14 |
| 6969630 | Method of making an integrated electromechanical switch and tunable capacitor | — | 2005-11-29 |
| 6815739 | Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates | Michael A. Huff | 2004-11-09 |
| 6800912 | Integrated electromechanical switch and tunable capacitor and method of making the same | — | 2004-10-05 |
| 6709739 | Closed cell metal composites | Robert L. Mullen, Gerhard E. Welsch | 2004-03-23 |
| 5890268 | Method of forming closed cell metal composites | Robert L. Mullen, Gerhard E. Welsch | 1999-04-06 |