Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297529 | Method and system for controlling the state of stress in deposited thin films | Michael A. Huff | 2025-05-13 |
| 10910185 | Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devices | Mehmet Ozgur, Lance Oh, Michael A. Huff, Michael Syskind PEDERSEN | 2021-02-02 |
| 10403463 | Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devices | Mehmet Ozgur, Lance Oh, Michael A. Huff, Michael Syskind PEDERSEN | 2019-09-03 |
| 9852870 | Method for the fabrication of electron field emission devices including carbon nanotube field electron emisson devices | Mehmet Ozgur, Lance Oh, Michael A. Huff, Michael Syskind PEDERSEN | 2017-12-26 |
| 9053929 | Method and system for integrated MEMS and NEMS using deposited thin films having pre-determined stress states | Michael A. Huff | 2015-06-09 |
| 8852378 | Tailorable titanium-tungsten alloy material thermally matched to semiconductor substrates and devices | Michael A. Huff | 2014-10-07 |