Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8653357 | Method for heat dissipation on semiconductor device | Zachary Prather, Michael Berman | 2014-02-18 |
| 8404960 | Method for heat dissipation on semiconductor device | Zachary Prather, Michael Berman | 2013-03-26 |
| 7332062 | Electroplating tool for semiconductor manufacture having electric field control | Michael Berman | 2008-02-19 |
| 7314527 | Reactor system | Preston E. Pillow | 2008-01-01 |
| 7198546 | Method to monitor pad wear in CMP processing | Michael Berman, Matthew Trattles | 2007-04-03 |
| 7183787 | Contact resistance device for improved process control | Michael Berman | 2007-02-27 |
| 7067048 | Method to improve the control of electro-polishing by use of a plating electrode an electrolyte bath | Michael Berman | 2006-06-27 |
| 6982206 | Mechanism for improving the structural integrity of low-k films | Michael Berman, Hemanshu Bhatt | 2006-01-03 |
| 6971944 | Method and control system for improving CMP process by detecting and reacting to harmonic oscillation | Michael Berman, Bruce Whitefield | 2005-12-06 |
| 6927177 | Chemical mechanical electropolishing system | Michael Berman | 2005-08-09 |
| 6874510 | Method to use a laser to perform the edge clean operation on a semiconductor wafer | Michael Berman, Rennie Barber | 2005-04-05 |
| 6869893 | Laminate low K film | Michael Berman, Rennie Barber | 2005-03-22 |
| 6837967 | Method and apparatus for cleaning deposited films from the edge of a wafer | Michael Berman, Rennie Barber | 2005-01-04 |
| 6743701 | Method for the formation of active area utilizing reverse trench isolation | Michael Berman, Derryl D. J. Allman | 2004-06-01 |
| 6739953 | Mechanical stress free processing method | Michael Berman | 2004-05-25 |
| 6650958 | Integrated process tool monitoring system for semiconductor fabrication | Attila Balázs, Bruce Whitefield, Hiroshi Mizuno, Russell Whaley, Paul Szasz | 2003-11-18 |
| 6649537 | Intermittent pulsed oxidation process | Hemanshu Bhatt | 2003-11-18 |
| 6635116 | Residual oxygen reduction system | Mark Mayeda, Richard Gimmi, Matthew Trattles | 2003-10-21 |
| 6574525 | In situ measurement | Hemanshu Bhatt | 2003-06-03 |
| 6355577 | System to reduce particulate contamination | Ynhi Le | 2002-03-12 |
| 6328347 | Uniform axial loading ground glass joint clamp | Preston E. Pillow, William Loren Emery | 2001-12-11 |
| 5146869 | Tube and injector for preheating gases in a chemical vapor deposition reactor | Kenneth W. Bohannon, Kuppuswamy Srikrishna, Anthony F. Sholing | 1992-09-15 |