Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943055 | Method and apparatus for detecting backside contamination during fabrication of a semiconductor wafer | Michael Berman, George E. Bailey | 2005-09-13 |
| 6898064 | System and method for optimizing the electrostatic removal of a workpiece from a chuck | Michael Berman | 2005-05-24 |
| 6874510 | Method to use a laser to perform the edge clean operation on a semiconductor wafer | Steven Reder, Michael Berman | 2005-04-05 |
| 6869893 | Laminate low K film | Steven Reder, Michael Berman | 2005-03-22 |
| 6849936 | System and method for using film deposition techniques to provide an antenna within an integrated circuit package | Michael Berman | 2005-02-01 |
| 6837967 | Method and apparatus for cleaning deposited films from the edge of a wafer | Michael Berman, Steven Reder | 2005-01-04 |
| 6627466 | Method and apparatus for detecting backside contamination during fabrication of a semiconductor wafer | Michael Berman, George E. Bailey | 2003-09-30 |
| 5942038 | Cooling element for a semiconductor fabrication chamber | Mark Mayeda | 1999-08-24 |
| 5497727 | Cooling element for a semiconductor fabrication chamber | Mark Mayeda | 1996-03-12 |