Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635116 | Residual oxygen reduction system | Steven Reder, Richard Gimmi, Matthew Trattles | 2003-10-21 |
| 5942038 | Cooling element for a semiconductor fabrication chamber | Rennie Barber | 1999-08-24 |
| 5635244 | Method of forming a layer of material on a wafer | Wilbur G. Catabay, Joe W. Zhao | 1997-06-03 |
| 5614249 | Leak detection system for a gas manifold of a chemical vapor deposition apparatus | — | 1997-03-25 |
| 5497727 | Cooling element for a semiconductor fabrication chamber | Rennie Barber | 1996-03-12 |