Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195730 | Method and apparatus for processing wafer-shaped articles | Rainer Obweger, Andreas Gleissner, Thomas Wirnsberger, Franz Kumnig, Alessandro Baldaro +4 more | 2021-12-07 |
| 10490426 | Method and apparatus for processing wafer-shaped articles | Rainer Obweger, Andreas Gleissner, Thomas Wirnsberger, Franz Kumnig, Alessandro Baldaro +4 more | 2019-11-26 |