Issued Patents All Time
Showing 126–128 of 128 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5759280 | Inductively coupled source for deriving substantially uniform plasma flux | Michael Barnes | 1998-06-02 |
| 5667631 | Dry etching of transparent electrodes in a low pressure plasma reactor | Alex Demos | 1997-09-16 |
| 5589737 | Plasma processor for large workpieces | Michael Barnes, Neil M.P. Benjamin, Richard D. Beer, Robert Veltrop | 1996-12-31 |