Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9659757 | Measuring and controlling wafer potential in pulsed RF bias processing | Andras Kuthi, Stephen Hwang, James C. Vetter, Rongping Wang, Tuan Ngo | 2017-05-23 |
| 8303763 | Measuring and controlling wafer potential in pulsed RF bias processing | Andras Kuthi, Stephen Hwang, James C. Vetter, Rongping Wang, Tuan Ngo | 2012-11-06 |
| 8192576 | Methods of and apparatus for measuring and controlling wafer potential in pulsed RF bias processing | Andras Kuthi, Stephen Hwang, James C. Vetter, Rongping Wang, Tuan Ngo | 2012-06-05 |