Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9659757 | Measuring and controlling wafer potential in pulsed RF bias processing | Andras Kuthi, Stephen Hwang, James C. Vetter, Rongping Wang, Tuan Ngo | 2017-05-23 | $39,116,000 |
| 8303763 | Measuring and controlling wafer potential in pulsed RF bias processing | Andras Kuthi, Stephen Hwang, James C. Vetter, Rongping Wang, Tuan Ngo | 2012-11-06 | $18,496,000 |
| 8192576 | Methods of and apparatus for measuring and controlling wafer potential in pulsed RF bias processing | Andras Kuthi, Stephen Hwang, James C. Vetter, Rongping Wang, Tuan Ngo | 2012-06-05 | $27,452,000 |