Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9659757 | Measuring and controlling wafer potential in pulsed RF bias processing | Andras Kuthi, James C. Vetter, Greg Eilenstine, Rongping Wang, Tuan Ngo | 2017-05-23 |
| 8303763 | Measuring and controlling wafer potential in pulsed RF bias processing | Andras Kuthi, James C. Vetter, Greg Eilenstine, Rongping Wang, Tuan Ngo | 2012-11-06 |
| 8192576 | Methods of and apparatus for measuring and controlling wafer potential in pulsed RF bias processing | Andras Kuthi, James C. Vetter, Greg Eilenstine, Rongping Wang, Tuan Ngo | 2012-06-05 |
| 6572582 | Mixing system for an active agent delivery device | Patrick S. L. Wong, Vincent J. Ferrari | 2003-06-03 |
| 6024721 | Mixing system for an active agent delivery device | Patrick S. L. Wong, Vincent J. Ferrari | 2000-02-15 |
| 5166095 | Low contact resistance process | — | 1992-11-24 |