Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5868863 | Method and apparatus for cleaning of semiconductor substrates using hydrofluoric acid (HF) | Michael Ravkin, Xiuhua Zhang, Wilbur C. Krusell | 1999-02-09 |
| 5858109 | Method and apparatus for cleaning of semiconductor substrates using standard clean 1 (SC1) | Mikhail Ravkin, Wibur C. Krusell, Venus Noorai | 1999-01-12 |