Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6324715 | Apparatus for cleaning semiconductor substrates | Diane Hymes, Mikhail Ravkin, Wibur C. Krusell | 2001-12-04 |
| 5858109 | Method and apparatus for cleaning of semiconductor substrates using standard clean 1 (SC1) | Diane Hymes, Mikhail Ravkin, Wibur C. Krusell | 1999-01-12 |