Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8101237 | Tellurium precursors for film deposition | Shingo Okubo, Kazutaka Yanagita | 2012-01-24 |
| 8092721 | Deposition of ternary oxide films containing ruthenium and alkali earth metals | Satoko Gatineau, Christian Dussarrat | 2012-01-10 |
| 7807223 | Precursors having open ligands for ruthenium containing films deposition | Christian Dussarrat | 2010-10-05 |
| 7544389 | Precursor for film formation and method for forming ruthenium-containing film | Christian Dussarrat, Kazutaka Yanagita | 2009-06-09 |