Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8246744 | Method for predicting precipitation behavior of oxygen in silicon single crystal, method for determining production parameter of silicon single crystal, and storage medium for storing program for predicting precipitation behavior of oxygen in silicon single crystal | Kozo Nakamura, Tetsuro Akagi, Shiro Yoshino | 2012-08-21 |
| 8241424 | Single crystal semiconductor manufacturing apparatus and manufacturing method | Tetsuhiro Iida, Yutaka Shiraishi | 2012-08-14 |
| 8150784 | Control system and method for controlled object in time variant system with dead time, such as single crystal production device by czochralski method | Kenichi Bandoh, Shigeo Morimoto, Takuji Okumura, Tetsu Nagata, Masaru Shimada +2 more | 2012-04-03 |
| 7390361 | Semiconductor single crystal manufacturing apparatus and graphite crucible | Tetsuhiro Iida, Akiko Noda | 2008-06-24 |
| 7226506 | Single crystal silicon producing method, single crystal silicon wafer producing method, seed crystal for producing single crystal silicon, single crystal silicon ingot, and single crystal silicon wafer | Tetsuhiro Iida, Yutaka Shiraishi, Ryota Suewaka | 2007-06-05 |
| 6315827 | Apparatus for producing single crystal | Shoei Kurosaka, Masakazu Kobayashi, Kazuhiro Mimura, Kenji Okamura, Hiroshi Monden +2 more | 2001-11-13 |
| 6273944 | Silicon wafer for hydrogen heat treatment and method for manufacturing the same | Toshiaki Saishoji, Kozo Nakamura | 2001-08-14 |
| 6270575 | Apparatus and a method of manufacturing a crystal | Shoei Kurosaka, Makoto Kamogawa, Nobuyuki Hukuda | 2001-08-07 |
| 6179911 | Method for manufacturing single crystal | Hiroshi Inagaki, Fumitaka Ishikawa | 2001-01-30 |
| 6179910 | Method for manufacturing silicon single crystals and wafers adapted for producing semiconductors | Takashi Yokoyama, Shin Matsukuma, Toshiaki Saishoji, Kozo Nakamura | 2001-01-30 |
| 6171393 | Seed crystal and method of manufacturing single crystal | Shoei Kurosaka, Masakazu Kobayashi, Shuji Onoue, Tsuyoshi Sadamatsu | 2001-01-09 |
| 6099642 | Apparatus for pulling up single crystals and single crystal clamping device | Shoei Kurosaka, Hiroshi Inagaki, Shigeki Kawashima | 2000-08-08 |
| 6056931 | Silicon wafer for hydrogen heat treatment and method for manufacturing the same | Toshiaki Saishoji, Kozo Nakamura | 2000-05-02 |
| 6042644 | Single crystal pulling method | Shoei Kurosaka, Hiroshi Inagaki, Shigeki Kawashima | 2000-03-28 |
| 6007625 | Apparatus for manufacturing single crystal | Hiroshi Inagaki, Fumitaka Ishikawa | 1999-12-28 |
| 5968260 | Method for fabricating a single-crystal semiconductor | Toshiaki Saishouji, Tetsuhiro Iida, Kouzou Nakamura, Toshimichi Kubota | 1999-10-19 |
| 5968262 | Method of fabricating silicon single crystals | Toshiaki Saishouji, Kouzou Nakamura, Toshimichi Kubota | 1999-10-19 |
| 5942033 | Apparatus and method for pulling up single crystals | Shoei Kurosaka, Hiroshi Inagaki, Shigeki Kawashima | 1999-08-24 |
| 5938836 | Apparatus and method for manufacturing semiconductor single crystals | Hiroshi Inagaki, Katsura Yamamoto | 1999-08-17 |
| 5885347 | Apparatus and method for lifting single crystals | Hiroshi Inagaki, Ayumi Suda, Toshimichi Kubota | 1999-03-23 |
| 5441014 | Apparatus for pulling up a single crystal | Kazunori Nagai, Akihiro Matsuzaki | 1995-08-15 |
| 5385115 | Semiconductor wafer heat treatment method | Tetsuro Akagi, Shiro Yoshino | 1995-01-31 |
| 5316742 | Single crystal pulling apparatus | Kazunori Nagai, Akihiro Matsuzaki | 1994-05-31 |