Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7727334 | Apparatus for pulling single crystal by CZ method | Hiroshi Inagaki, Shigeki Kawashima, Makoto Kamogawa, Toshirou Kotooka, Daisuke Ebi +7 more | 2010-06-01 |
| 7141113 | Production method for silicon single crystal and production device for single crystal ingot, and heat treating method for silicon crystal wafer | Kozo Nakamura, Hirotaka Nakajima, Shinya Sadohara, Masashi Nishimura, Toshirou Kotooka +1 more | 2006-11-28 |
| 6977010 | Apparatus for pulling single crystal by CZ method | Hiroshi Inagaki, Shigeki Kawashima, Makoto Kamogawa, Toshirou Kotooka, Daisuke Ebi +7 more | 2005-12-20 |
| 6869478 | Method for producing silicon single crystal having no flaw | Kozo Nakamura, Shinji Togawa, Toshirou Kotooka, Susumu Maeda | 2005-03-22 |
| 6273944 | Silicon wafer for hydrogen heat treatment and method for manufacturing the same | Kozo Nakamura, Junsuke Tomioka | 2001-08-14 |
| 6179910 | Method for manufacturing silicon single crystals and wafers adapted for producing semiconductors | Takashi Yokoyama, Shin Matsukuma, Kozo Nakamura, Junsuke Tomioka | 2001-01-30 |
| 6056931 | Silicon wafer for hydrogen heat treatment and method for manufacturing the same | Kozo Nakamura, Junsuke Tomioka | 2000-05-02 |
| 6042646 | Simple method for detecting temperature distributions in single crystals and method for manufacturing silicon single crystals by employing the simple method | Fumitaka Ishikawa, Kozo Nakamura | 2000-03-28 |
| 5948159 | Method of controlling defects of a silicon single crystal | Kozo Nakamura, Toshimichi Kubota | 1999-09-07 |
| 5824152 | Semiconductor single-crystal pulling apparatus | Toshimichi Kubota, Toshiro Kotooka, Tetsuhiro Iida | 1998-10-20 |