Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12377507 | Control device, industrial machine, and control method | Mohammad Munzir | 2025-08-05 |
| 11458584 | Machine tool, machined-object manufacturing method, and machining system | Mohammad Munzir, Akira Nakayama | 2022-10-04 |
| 8399811 | Stage for substrate temperature control apparatus | Katsuo Saio, Kazuhiko Kubota | 2013-03-19 |
| 8191792 | Temperature sensor, temperature control device, temperature controller and temperature-control method | — | 2012-06-05 |
| 8150784 | Control system and method for controlled object in time variant system with dead time, such as single crystal production device by czochralski method | Shigeo Morimoto, Takuji Okumura, Tetsu Nagata, Masaru Shimada, Junsuke Tomioka +2 more | 2012-04-03 |
| 6626236 | Substrate temperature control plate and substrate temperature control apparatus comprising same | Akihiro Ohsawa, Mikio Minonishi | 2003-09-30 |