Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261066 | Substrate processing apparatus and furnace opening closer | Takashi Nogami | 2025-03-25 |
| 11935762 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Daigi KAMIMURA, Tomoshi Taniyama, Kenji Shirako, Hironori Shimada, Akira HORII +1 more | 2024-03-19 |
| 11450536 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Tomoshi Taniyama, Kenji Shirako, Hironori Shimada, Akira HORII +1 more | 2022-09-20 |