Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10371503 | Shape measurement method and shape measurement device | Shunsuke Takami, Norihisa Harano | 2019-08-06 |
| 8310536 | Shape measurement apparatus and shape measurement method | Masaru Akamatsu, Yasuhide Nakai | 2012-11-13 |
| 8228509 | Shape measuring device | Masaru Akamatsu, Yasuhide Nakai | 2012-07-24 |
| 5760597 | Method of and apparatus for measuring lifetime of carriers in semiconductor sample | Naoyuki Yoshida, Hiroyuki Takamatsu, Shingo Sumie, Yutaka Kawata, Futoshi Ojima +1 more | 1998-06-02 |
| 5438276 | Apparatus for measuring the life time of minority carriers of a semiconductor wafer | Yutaka Kawata, Takuya Kusaka, Futoshi Ojima | 1995-08-01 |
| 5430386 | Method and apparatus for evaluating semiconductor wafers by irradiation with microwave and excitation light | Michel Morin, Jean-Michel Friedt, Yasuhide Nakai, Chiyo Fujihira, Masatake Hirose | 1995-07-04 |