Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5430386 | Method and apparatus for evaluating semiconductor wafers by irradiation with microwave and excitation light | Michel Morin, Jean-Michel Friedt, Yasuhide Nakai, Hidehisa Hashizume, Masatake Hirose | 1995-07-04 |