Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7612906 | Data output apparatus, data output method, program, and storage medium | — | 2009-11-03 |
| 7246796 | Carburetor, various types of devices using the carburetor, and method of vaporization | Masaki Kusuhara, Masaru Umeda, Mitsuru Fukagawa | 2007-07-24 |
| 7239423 | Image processing apparatus | — | 2007-07-03 |
| 7092775 | Production planning apparatus and production planning method | Tazu NOMOTO, Mitsuhiro Enomoto, Mitsunobu Nakamura | 2006-08-15 |
| 6931203 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masaki Kusuhara, Mikio Doi, Masaru Umeda, Mitsuru Fukagawa, Yoichi Kanno +3 more | 2005-08-16 |
| 6540840 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masaki Kusuhara, Mikio Doi, Masaru Umeda, Mitsuru Fukagawa, Yoichi Kanno +3 more | 2003-04-01 |
| 6517635 | Liquid feed nozzle, wet treatment apparatus and wet treatment method | Kenichi Mitsumori, Yasuhiko Kasama, Akira Abe, Oh Eui Yeol, Tadahiro Ohmi +1 more | 2003-02-11 |
| 6447217 | Substrate transfer device and operating method thereof | Masaki Kusuhara, Masaru Umeda, Michio Yagai | 2002-09-10 |
| 6398464 | Air stream transfer apparatus | Michio Yagai, Masaru Umeda | 2002-06-04 |
| 6394733 | Substrate body transfer apparatus | Masaki Kusuhara, Masaru Umeda, Michio Yagai | 2002-05-28 |
| 6343239 | Transportation method for substrate wafers and transportation apparatus | Tadahiro Ohmi, Yoshio Ishihara | 2002-01-29 |
| 6315501 | Air stream particulate collecting transfer apparatus | Michio Yagai, Masaru Umeda | 2001-11-13 |
| 6240610 | Wafer and transport system | Yoshio Ishihara, Tadahiro Ohmi | 2001-06-05 |
| 6230722 | Liquid feed nozzle, wet treatment, apparatus and wet treatment method | Kenichi Mitsumori, Yasuhiko Kasama, Akira Abe, Oh Eui Yeol, Tadahiro Ohmi +1 more | 2001-05-15 |
| 5953591 | Process for laser detection of gas and contaminants in a wafer transport gas tunnel | Yoshio Ishihara, Tadahiro Ohmi | 1999-09-14 |
| 5921744 | Wafer carrying device and wafer carrying method | Takashi Onoda, Tadahiro Ohmi, Masaru Umeda, Yoichi Kanno | 1999-07-13 |
| 5518360 | Wafer carrying device and wafer carrying method | Takashi Onoda, Tadahiro Ohmi, Masaru Umeda, Yoichi Kanno | 1996-05-21 |