Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6352628 | Refractory metal silicide target, method of manufacturing the target, refractory metal silicide thin film, and semiconductor device | Michio Sato, Takashi Yamanobe, Yoshiharu Fukasawa, Noriaki Yagi, Toshihiro Maki +1 more | 2002-03-05 |
| 6309593 | Refractory metal silicide target, method of manufacturing the target, refractory metal silicide thin film, and semiconductor device | Michio Sato, Takashi Yamanobe, Yoshiharu Fukasawa, Noriaki Yagi, Toshihiro Maki +1 more | 2001-10-30 |