Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6883160 | Pattern inspection apparatus | Hideo Tsuchiya, Kyoji Yamashita, Toshiyuki Watanabe, Kazuhiro Nakashima | 2005-04-19 |
| 5890699 | Fluid flow control rotary valve | Akira Furukawa | 1999-04-06 |
| 5684371 | Drive circuit for a bidirectional flow control valve | Jun Tarui, Akira Furukawa | 1997-11-04 |
| 5291536 | X-ray mask, method for fabricating the same, and pattern formation method | Masamitsu Itoh, Ken Murooka | 1994-03-01 |