Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11824011 | Memory device and method of manufacturing memory device | — | 2023-11-21 |
| 10276459 | Measurement method, measurement program, and measurement system | Manabu Takakuwa | 2019-04-30 |
| 10040219 | Mold and mold manufacturing method | Yoko Takekawa, Ryouichi Inanami, Masafumi Asano, Kazuhiro Takahata, Sachiko Kobayashi +3 more | 2018-08-07 |
| 10026698 | Reducing wafer warpage during wafer processing | — | 2018-07-17 |
| 9881121 | Verification method of mask pattern, manufacturing method of a semiconductor device and nontransitory computer readable medium storing a mask pattern verification program | — | 2018-01-30 |
| 9812403 | Reducing wafer warpage during wafer processing | — | 2017-11-07 |
| 9079602 | Steering system and steering control apparatus | Yuji Ebihara | 2015-07-14 |
| 8785329 | Method for forming pattern and method for manufacturing semiconductor device | Shimon Maeda | 2014-07-22 |
| 8127256 | Pattern data generation method, design layout generating method, and pattern data verifying program | — | 2012-02-28 |
| 6940585 | Evaluation mask, focus measuring method and aberration measuring method | Hiroshi Nomura | 2005-09-06 |
| 6741327 | Method of correcting projection optical system and method of manufacturing semiconductor device | Hiroshi Nomura, Manabu Takakuwa | 2004-05-25 |
| 6674511 | Evaluation mask, focus measuring method and aberration measuring method | Hiroshi Nomura | 2004-01-06 |