Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6742944 | ALKALINE SOLUTION AND MANUFACTURING METHOD, AND ALKALINE SOLUTION APPLIED TO PATTERN FORMING METHOD, RESIST FILM REMOVING METHOD, SOLUTION APPLICATION METHOD, SUBSTRATE TREATMENT METHOD, SOLUTION SUPPLY METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD | Riichiro Takahashi, Tomoyuki Takeishi, Shinichi Ito | 2004-06-01 |
| 6686130 | Pattern forming method using photolithography | Shinichi Ito | 2004-02-03 |
| 6603101 | Heating device, method for evaluating heating device and pattern forming method | Shinichi Ito, Kenji Kawano | 2003-08-05 |
| 6441351 | Heating device, method for evaluating heating device and pattern forming method | Shinichi Ito, Kenji Kawano | 2002-08-27 |
| 6423977 | Pattern size evaluation apparatus | Shinichi Ito, Kenji Kawano, Soichi Inoue, Katsuya Okumura | 2002-07-23 |
| 6251544 | Exposure dose measuring method and exposure dose measuring mask | Soichi Inoue, Shinichi Ito | 2001-06-26 |
| 6191397 | Heating device, method for evaluating heating device and pattern forming method | Shinichi Ito, Kenji Kawano | 2001-02-20 |
| 6187488 | Pattern estimating method and pattern forming method | Shinichi Ito, Fumio Komatsu | 2001-02-13 |