Issued Patents All Time
Showing 26–50 of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6696721 | Semiconductor device having a three-dimensional capacitor such as a stack-type capacitor | — | 2004-02-24 |
| 6690054 | Capacitor | Jun Lin, Chung-Ming Chu, Toshiya Suzuki | 2004-02-10 |
| 6664592 | Semiconductor device with groove type channel structure | Seiji Inumiya, Tomohiro Saito, Atsushi Yagishita, Toshihiko Iinuma | 2003-12-16 |
| 6611017 | Semiconductor device provided with capacitor having cavity-provided electrode | — | 2003-08-26 |
| 6600166 | Scanning exposure method | Takashi Sato | 2003-07-29 |
| 6541813 | Capacitor and method for manufacturing the same | Shoko Niwa, Hiroshi Tomita, Kazuhiro Eguchi | 2003-04-01 |
| 6515338 | Semiconductor device and manufacturing method therefor | Seiji Inumiya, Tomohiro Saito, Atsushi Yagishita, Toshihiko Iinuma | 2003-02-04 |
| 6495054 | Etching method and cleaning method of chemical vapor growth apparatus | Kazuhiro Eguchi, Katsuya Okumura, Masahiro Kiyotoshi, Soichi Yamazaki | 2002-12-17 |
| 6482714 | Semiconductor device and method of manufacturing the same | Kyoichi Suguro | 2002-11-19 |
| 6403997 | Method for manufacturing semiconductor devices | Seiji Inumiya, Tetsuo Matsuda, Yoshio Ozawa | 2002-06-11 |
| 6388282 | Semiconductor memory device and method of manufacture the same | — | 2002-05-14 |
| 6373085 | Semiconductor memory cell having two epitaxial layers and its manufacturing method | — | 2002-04-16 |
| 6351006 | Ferroelectric capacitor with means to prevent deterioration | Koji Yamakawa, Osamu Arisumi, Tsunetoshi Arikado, Hideyuki Kanai | 2002-02-26 |
| 6335241 | Semiconductor device and manufacturing method thereof | Soichi Yamazaki, Kazuhiro Eguchi, Kyoichi Suguro | 2002-01-01 |
| 6331734 | Semiconductor device and method for manufacturing the same | — | 2001-12-18 |
| 6278152 | Semiconductor device and method of manufacturing the same | Kazuhiro Eguchi, Keitaro Imai, Tomonori Aoyama | 2001-08-21 |
| 6278164 | Semiconductor device with gate insulator formed of high dielectric film | Yoshitaka Tsunashima, Keitaro Imai, Tomonori Aoyama | 2001-08-21 |
| 6251763 | Semiconductor device and method for manufacturing same | Seiji Inumiya, Tetsuo Matsuda, Yoshio Ozawa | 2001-06-26 |
| 6236079 | Dynamic semiconductor memory device having a trench capacitor | Akihiro Nitayama | 2001-05-22 |
| 6162564 | Mask blank and method of producing mask | Thomas Fischer, Andreas Grassmann | 2000-12-19 |
| 6159868 | Method of forming a high quality layer of BST | Masahiro Kiyotoshi, Kazuhiro Eguchi | 2000-12-12 |
| 6124189 | Metallization structure and method for a semiconductor device | Toru Watanabe, Katsuya Okumura | 2000-09-26 |
| 6072221 | Semiconductor device having self-aligned contact plug and metallized gate electrode | — | 2000-06-06 |
| 6054355 | Method of manufacturing a semiconductor device which includes forming a dummy gate | Seiji Inumiya, Tomohiro Saito, Atsushi Yagishita, Toshihiko Iinuma | 2000-04-25 |
| 6015990 | Semiconductor memory device and method of manufacturing the same | Tsunetoshi Arikado, Katsuya Okumura | 2000-01-18 |